Application Industries:Semiconductor, Photovoltaics, Solar Energy
Application Technology:Etching, Thin Film, Diffusion
Equipment Functions:
Through high-temperature plasma electric arc cracking, combined with wet scrubbing to purify toxic gases.
Can handle PFCs, silicide, flammable gases, water-soluble gases, toxic gases, etc.
Equipment Features:
High processing efficiency
Simplified PLC operation
Safety interlock design