Products

Local Scrubber

Local Scrubber

Application Industries:Semiconductor, Photovoltaics, Solar Energy

Application Technology:Etching, Thin Film, Diffusion


Equipment Functions:

Through high-temperature plasma electric arc cracking, combined with wet scrubbing to purify toxic gases. 

Can handle PFCs, silicide, flammable gases, water-soluble gases, toxic gases, etc.


Equipment Features:

High processing efficiency
Simplified PLC operation
Safety interlock design